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发明名称
PROCESS OF MANUFACTURE OF SILICON P WITH SUBERIPT PLUS-P STRUCTURES
摘要
申请公布号
RU1829757(C)
申请公布日期
1996.04.20
申请号
SU19904861913
申请日期
1990.08.21
申请人
NAUCHNO-ISSLEDOVATELSKIJ INSTITUT "PULSAR"
发明人
AVETISYAN G.KH.;ENISHERLOVA K.L.;KLEMIN S.N.;ORLOV P.B.;SHMELEVA G.G.
分类号
H01L21/225;(IPC1-7):H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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