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发明名称
Polysiloxanderivate enthaltende lichtempfindliche Harze.
摘要
申请公布号
DE69113661(T2)
申请公布日期
1996.04.18
申请号
DE19916013661T
申请日期
1991.03.13
申请人
OKI ELECTRIC INDUSTRY CO., LTD., TOKIO/TOKYO, JP
发明人
SAKATA, MIWA, C/O OKI ELECTRIC INDUSTRY CO.LTD., MINATO-KU, TOKYO, JP;ITO, TOSHIO, C/O OKI ELECTRIC INDUSTRY CO. LTD., MINATO-KU, TOKYO, JP
分类号
C08G77/48;G03F7/075;H01L21/027;(IPC1-7):G03F7/075;C08G77/24
主分类号
C08G77/48
代理机构
代理人
主权项
地址
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