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发明名称
Verfahren zur Vorbereitung einer Blende zur Verminderung von Teilchen in einer Kammer zur physikalischen Aufdampfung.
摘要
申请公布号
DE69111490(T2)
申请公布日期
1996.04.18
申请号
DE19916011490T
申请日期
1991.02.19
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
TALIEH, HUMOYOUN, SANTA CLARA, CALIFORNIA 95054, US;GILBOA, HAIM, PALO ALTO, CALIFORNIA 94306, US;MINTZ, DONALD M., SUNNYVALE, CALIFORNIA 94087, US
分类号
C23C14/00;C23C14/02;C23C14/56;C23F4/00;C30B25/06;C30B25/08;H01L21/203;H01L21/302;(IPC1-7):C23C14/22;C23C14/34
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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