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发明名称
Cryopump and cyropanel having a frost concentrating device
摘要
申请公布号
GB2283063(B)
申请公布日期
1996.04.17
申请号
GB19940024754
申请日期
1993.06.08
申请人
* HELIX TECHNOLOGY CORPORATION
发明人
ALLEN J * BARTLETT;CHARLES A * STOCHL;DALE A * DOPSON;PAUL * MEROSKI;THOMAS F * STEVENS;ANTHONY M * GUERRA
分类号
F04B37/08;(IPC1-7):F04B37/08
主分类号
F04B37/08
代理机构
代理人
主权项
地址
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