发明名称 |
Process for producing a SrTiO3-YBa2Cu3O7 layered structure and layered structure consisting of SrTiO3 and YBa2Cu3O7 |
摘要 |
The invention relates to a process for producing YBa2Cu3O7 layers grown so as to be c-axis-oriented and to a layer structure of this type. In spite of c-axis-oriented deposition, from a certain layer thickness onwards a-axis-oriented domains occur to an increasing extent. Faults produced thereby are eliminated by applying an SrTiO3 interlayer of a suitable thickness, so that alternating YBa2Cu3O7 and SrTiO3 layers are produced. Accordingly alternating layer sequences make up a layer structure thus produced. YBa2Cu3O7 layers are expediently no thicker than 500 nm. SrTiO3 interlayers have a thickness of 20 - 30 nm. <IMAGE> |
申请公布号 |
EP0541011(B1) |
申请公布日期 |
1996.04.17 |
申请号 |
EP19920118576 |
申请日期 |
1992.10.30 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
SOLTNER, HELMUT;POPPE, ULRICH, DR.;URBAN, KNUT, PROF. |
分类号 |
C23C14/08;C30B23/02;H01L39/12;H01L39/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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