| 摘要 |
<p>A probe is disclosed for simultaneously testing a grouping of integrated circuit chips formed adjacent one another in the grouping on a semiconductor wafer. Each chip has a longitudinal dimension and a transverse dimension. The probe comprises a substantially rigid substrate having at least one elongated port (14) formed therein, the port (14) having a width not greater than one and one half times the transverse dimension. A flexible transparent membrane (16) extends across the elongated port (14) at least with a segment thereof. A plurality of electrically conductive traces (22) is formed on the membrane (16). A plurality of contact pads (30) is formed on selective ones of the traces (22). The contact pads (30) are disposed within the segments of the membrane (16). <IMAGE></p> |
