发明名称 TURBO-MOLECULAR PUMP
摘要 PURPOSE: To protect a bearing from burning damage, etc., and also prevent a reaction product from being stuck in a range by sensing the temperature of a range from an outer circumference which includes the lower end of a rotor to an opposing surface, and controlling cooling means to a temperature for protecting the bering on the basis of the detected value. CONSTITUTION: A cooling means 22 consists of a cooling plate 22a which is tightly fitted to the bottom wall lower surface of an oil tank 29, and a spiral water cooling pipe 22c which is buried and fixed in a groove 22b to be recessed- provided on the cooling plate 22a. Cooling water is led from an outside passing an piping 22d and a solenoid valve 22e so as to cool oil in the oil tank 9, and both of lubrication and cooling effect are obtained when oil is supplied to upper and lower bearings 4, 5. On the other hand, a sensor 23 is formed as a temperature sensing resistor, which is within the wall thickness of a base 2 and which is inserted from a side on the just below position of a range A. By a control means 24, a signal for controlling the solenoid valve 22e is outputted so as to maintain the value which is detected by the temperature sensing resistor 23 to a target value (b) which is set beforehand.
申请公布号 JPH08100787(A) 申请公布日期 1996.04.16
申请号 JP19950274571 申请日期 1995.10.23
申请人 SHIMADZU CORP 发明人 KAWAGUCHI JUICHI;NISHIKAWA HIDETO
分类号 F04D19/04;F04D29/58;(IPC1-7):F04D19/04 主分类号 F04D19/04
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