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发明名称
CRYSTALLIZATION METHOD AND MANUFACTURE OF THIN FILM TRANSISTOR USING ITS METHOD
摘要
申请公布号
JPH08102543(A)
申请公布日期
1996.04.16
申请号
JP19950194023
申请日期
1995.07.07
申请人
L JII SEMIKON CO LTD
发明人
ON ZU ZO;ZE SON RO
分类号
H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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