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发明名称
FILM FORMING APPARATUS
摘要
申请公布号
JPH08100256(A)
申请公布日期
1996.04.16
申请号
JP19940236974
申请日期
1994.09.30
申请人
HITACHI LTD
发明人
KIYONO TOMOYUKI;SATO TADASHI
分类号
C23C14/34;C23C16/44;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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