INSERTION TUBE MOUNTING PIEZOELECTRIC OSCILLATOR MODULE

摘要

PURPOSE: To obtain an insertion tube for mounting a pressure sensor module which can be arranged on a bent insertion tube or a hard mirror by mounting a piezoelectric oscillator module having a plurality of through holes and a plurality of electrical connection members being fitted therein. CONSTITUTION: The piezoelectric oscillator module comprises a piezoelectric element and a drive circuit formed integrally on a silicon substrate 1. Through holes 5a-5d are made through the silicon substrate 1 by chemical etching. A signal transmitting means comprises a plurality of conductive wires arranged at the forward end part or on the outer wall of the insertion tube. Electrical connection members formed on the conductive wires are fused in the through hoes 5a-5d and then solidified. The piezoelectric oscillator module is mounted on the insertion tube. The piezoelectric oscillator module which is constituted of the silicon substrate 1 having <110> face as the major surface is mounted on the insertion tube.