发明名称 |
Scanning probe type microscope apparatus |
摘要 |
A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.
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申请公布号 |
US5508517(A) |
申请公布日期 |
1996.04.16 |
申请号 |
US19950461142 |
申请日期 |
1995.06.05 |
申请人 |
NIKON CORPORATION |
发明人 |
ONUKI, TETSUJI;SUZUKI, MASATOSHI;FUJII, TORU;MATSUSHIRO, HIROYUKI;OHKUBO, HIDEAKI |
分类号 |
G01Q20/02;G01N27/00;G01Q30/02;G01Q30/18;G01Q70/02;G02B21/00;(IPC1-7):H01J37/26 |
主分类号 |
G01Q20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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