| 摘要 |
PURPOSE: To precisely measure the beam spot of a laser beam machine. CONSTITUTION: This laser beam machine is provided with a laser beam source 10, a scanning mirror 2, a shutter 3, a condenser lens 4, a sample stage 8, a transparent plane substrate 5 and a beam spot shape measuring instrument 6. The laser beam 1P is prevented from passing the condenser lens 4 by the shutter 3 just before beam spot measurement. The reflected light 1R by a difference in the refractive index between the atm. and the transparent plane substrate 5 is measured by the beam spot shape measuring instrument 6. |
