发明名称 |
Interferometer, optical scanning type tunneling microscope and optical probe |
摘要 |
In an optical scanning type tunneling microscope, reference light is prepared in addition to light used to be projected to a sample, and this reference light and also light picked up from an optical probe are caused to interfere with each other. As a result, phase information of light about a region having a very smaller dimension than a wavelength of the light irradiated from alight source can be acquired.
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申请公布号 |
US5508805(A) |
申请公布日期 |
1996.04.16 |
申请号 |
US19940267431 |
申请日期 |
1994.06.29 |
申请人 |
HITACHI, LTD. |
发明人 |
MURANISHI, MASARU;KANDO, HIDEHIKO;KAINUMA, MAMORU;KIMURA, KATSUHIKO;SAEGUSA, SHOZO;TANAKA, KATSUYUKI |
分类号 |
G01B9/02;G01N21/45;G01Q30/02;G01Q60/00;G01Q60/18;G01Q60/22;(IPC1-7):G01B9/02;H01J3/14 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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