发明名称 Interferometer, optical scanning type tunneling microscope and optical probe
摘要 In an optical scanning type tunneling microscope, reference light is prepared in addition to light used to be projected to a sample, and this reference light and also light picked up from an optical probe are caused to interfere with each other. As a result, phase information of light about a region having a very smaller dimension than a wavelength of the light irradiated from alight source can be acquired.
申请公布号 US5508805(A) 申请公布日期 1996.04.16
申请号 US19940267431 申请日期 1994.06.29
申请人 HITACHI, LTD. 发明人 MURANISHI, MASARU;KANDO, HIDEHIKO;KAINUMA, MAMORU;KIMURA, KATSUHIKO;SAEGUSA, SHOZO;TANAKA, KATSUYUKI
分类号 G01B9/02;G01N21/45;G01Q30/02;G01Q60/00;G01Q60/18;G01Q60/22;(IPC1-7):G01B9/02;H01J3/14 主分类号 G01B9/02
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