发明名称 Photon assisted sub-tunneling electrical probe, probe tip, and probing method
摘要 An improved non-contact electrical measurement system, method, probe assembly, and probe tip. A probe tip having a photoemissive coating deposited thereon is provided and disposed substantially adjacent a measurement site of a test sample. The photoemissive coating of the probe tip is illuminated by a light source, and electrical measurements are made upon the probe tip to determine the electrical characteristics of the measurement site.
申请公布号 US5508627(A) 申请公布日期 1996.04.16
申请号 US19940240993 申请日期 1994.05.11
申请人 PATTERSON, JOSEPH M. 发明人 PATTERSON, JOSEPH M.
分类号 G01Q70/10;G01Q70/14;G01R1/07;G01R31/311;(IPC1-7):G01R31/302 主分类号 G01Q70/10
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