发明名称 VERTICAL/HORIZONTAL MOVING AND TURNING TABLE MECHANISM
摘要 <p>PURPOSE: To simplify a mechanism which permits a table to be moved in the vertical and horizontal directions and turned by attaining the mechanism without stacking stages provided with various functions. CONSTITUTION: A supporting unit U is constituted by rotatably-jointing respective traveling members of a pair of direct-acting guide bearings consisting of guide members 1a, 1b and traveling members 2a, 2b. At least three supporting units are disposed between a base 5 and a table 6. With the traveling members of the respective supporting units orthogonal to each other, the guide members are fixed onto the base 5 and the table 6 respectively. The base guide members of at least two supporting units are made to face each other and disposed in parallel. The base guide member of at least the other supporting unit is disposed at a right angle to the base guide member, and a straight feed mechanism is formed between the traveling members of at least two base guide members disposed in parallel and the base, and between the traveling member of at least one base guide member disposed at a right angle to those and the base.</p>
申请公布号 JPH0899243(A) 申请公布日期 1996.04.16
申请号 JP19940240366 申请日期 1994.10.04
申请人 HIIHAISUTO SEIKO KK 发明人 HIROSE KAZUYA
分类号 G01B5/00;B23Q1/00;B23Q1/48;G12B5/00;H01L21/68;(IPC1-7):B23Q1/48 主分类号 G01B5/00
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