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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0897201(A)
申请公布日期
1996.04.12
申请号
JP19940228188
申请日期
1994.09.22
申请人
SANYO ELECTRIC CO LTD
发明人
MITSUSAKA EIICHI
分类号
H01L21/316;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
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地址
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