| 摘要 |
PURPOSE: To detect the dislocation in X direction and Y direction and in rotation by forming at least tow line patterns not parallel with the direction of scanning of a scan beam used for scanning an alignment mark and besides not parallel with each other. CONSTITUTION: An alignment mark 90 consists of two line patterns. And, each line pattern is made to be neither parallel nor vertical to the direction of scanning 92, and so that the angle of crossing may be not less than 1 deg. and not more than 90 deg.. Moreover, the two line patterns are not made in parallel, and cross each other on the extension of the line pattern like a V shape. Letting the distance being obtained from the peak value a of the signal obtained by the scanning of the laser beam be Aμm and the distance to the peak value b be Bμm, the coordinate value in X direction shifted due to the movement of the alignment mark 90 can be found from the values Aμm and Bμm. |
