| 摘要 |
PURPOSE: To obtain a capacitive pressure sensor which is not susceptible to stray capacity and external field and can detect the pressure accurately. CONSTITUTION: The capacitive pressure sensor comprises a sensor chip 15. The sensor chip 15 comprises a silicon substrate 11 provided with an electrode part 16 and a glass substrate 12 provided with a diaphragm part 13 which is deformed depending on the pressure. The diaphragm part 13 and the electrode part 16 are disposed oppositely through a gap and the silicon substrate 11 is bonded to the glass substrate 12. The pressure sensor detects the pressure based on the variation of capacitance between the diaphragm part 13 and the electrode part 16 due to variation in the width of the gap caused by the pressure being applied to the diaphragm part 13. The sensor chip 15 is mounted on a shield member, also serves as a lead terminal 31, disposed in a sealed housing. |
