| 摘要 |
PURPOSE: To improve conductivity, thermal conduction, and air tightess, by using an aluminum-nitride-based ceramic material containing a given ratio by volume of a specific metal. CONSTITUTION: A ceramic lid is made of aluminum-mitride-based ceramic material. The ceramic meterial contains 20-80vol.% tungsten, or molybdenum, or both. The resistivity is reduced to 6 to 29×10<-6>Ω.cm, and the conductivity is improved. At the same time the thermal conduction is improved because of added metals. In this case, leakage of He is not observed and a ceramic lid with good airtightness can be obtained.
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