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发明名称
METHOD AND APPARATUS FOR VACUUM INSPECTION
摘要
申请公布号
JPH0894482(A)
申请公布日期
1996.04.12
申请号
JP19950152988
申请日期
1995.06.20
申请人
HITACHI LTD
发明人
INOUE MASASHI
分类号
G01M3/02;G01M3/24;(IPC1-7):G01M3/24
主分类号
G01M3/02
代理机构
代理人
主权项
地址
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