| 摘要 |
PURPOSE: To provide a holding substrate which prevents formed optical circuits from hindering the propagation of light as far as possible and prevents the connection loss at junctures between optical fibers and optical waveguides from increasing as far as possible. CONSTITUTION: This substrate is composed by forming a high-concn. diffusion layer 2 of a (p) type impurity on a first silicon single crystal 1 and a second silicon single crystal layer 3 on the high-concn. diffusion layer 2 of the (p) type impurity and is so formed that the high-concn. diffusion layer 2 of the (p) type impurity has grooves 5 thereon and that the side parts of these grooves 5 are paralleled with the plane of the second silicon single crystal layer 3. The optical fiber holding substrate is formed by coating the entire surface of the grooves 5 with a silicon oxide layer 7. |
