| 摘要 |
PURPOSE: To provide a solar cell manufacturing method well adaptable to the mass production by forming grooves or recesses not depending on the plane orientation ink the surface of a polycrystalline Si substrate, thereby reducing the surface reflectivity and hence the shorting current. CONSTITUTION: The surface of a polycrystalline Si substrate 11 is coated with a liq. photosensitive resin and this resin is etched to form openings 82 according to the shape of grooves or recesses to be formed into the surface thereof, while the substrate is masked 81. Abrasives 24 are sprayed by the air blasting method on the surface of the substrate through the openings 82, thus efficiently and accurately forming grooves or recesses into its surface, without depending on the plane orientation. |
