摘要 |
PURPOSE: To enable an X-ray emanating from an X-ray source to have its small incidence angle on a horizontal sample adjusted readily by means of a simple structure and to constantly apply the incident X-ray to the same illuminated position of the sample. CONSTITUTION: A mechanism for setting the incidence angle of an X-ray includes a support member 37 provided near an X-ray source 53; a locking member 38 which rotates above the support member 37 with the X-ray source 53 as its axis of rotation; a tilt stand 34 secured to the lower end 38b of the locking member 38 at one end and having a small-incidence-angle X-ray device 31 mounted thereon; and a tilt angle setting screw 34a for adjusting the tilt angle of the tilt stand 34. The tilt stand 34 is constantly rotated and tilted about a rotation axis Y-Y including the X-ray source 53 by the turning of the tilt angle setting screw 34a, so that the incidence angle of the X-ray on a sample 42 is set. |