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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPH0897191(A)
申请公布日期
1996.04.12
申请号
JP19940254449
申请日期
1994.09.22
申请人
TOKYO ELECTRON LTD
发明人
OKAMOTO SUSUMU;INASAWA KOICHIRO
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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