发明名称 |
Dispositif à onde acoustique de surface et son procéédé de fabrication. |
摘要 |
<p>This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials is kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.</p> |
申请公布号 |
FR2711863(B1) |
申请公布日期 |
1996.04.12 |
申请号 |
FR19940010465 |
申请日期 |
1994.08.31 |
申请人 |
FUJITSU LTD |
发明人 |
SATOH YOSHIO;IKATA OSAMU;UCHISHIBA HIDEMA;MATSUDA TAKASHI;NISHIHARA TOKIHIRO;TAKANATSU MITSUO;TANIGUCHI HAJIME |
分类号 |
H01L21/60;H03H3/08;H03H9/145;(IPC1-7):H03H9/25;H03H9/15 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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