发明名称 PHOTORESIST FILM
摘要 PURPOSE: To form a photoresist layer excellent in dispersion stability without causing defective dispersion of a phosphor and to improve the adhesion of the phosphor by incorporating a specified silane compd. and the phosphor into a photosensitive resin compsn. and laminating the resultant compsn. on a base film. CONSTITUTION: A phosphor and at least one kind of silane compd. selected from among epoxysilane, aminosilane and chloropropylsilane are incorporated into a photosensitive resin compsn. and the resultant compsn. is laminated on a base film to obtain the objective photoresist film. The phosphor is not especially limited but a phosphor obtd. by activating a matrix such as oxyhalide of a rare earth element with an activator is preferably used. Epoxysilane such as γ-glycidoxy-propyltrimethoxysilane or γ-glycidoxypropyltriethoxysilane is especially preferably used as the silane compd. Two or more kinds of such silane compds. may be used in combination.
申请公布号 JPH0895250(A) 申请公布日期 1996.04.12
申请号 JP19940252946 申请日期 1994.09.20
申请人 NIPPON SYNTHETIC CHEM IND CO LTD:THE;MITSUBISHI ELECTRIC CORP 发明人 IZUMI TSUKASA;SUGITA HIROSUKE;ARIMOTO HIRONOBU
分类号 G03F7/004;C09K11/00;G03F7/027;G03F7/028;G03F7/032;G03F7/038;G03F7/075;H01J9/227;H01J11/42;H01J17/04 主分类号 G03F7/004
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