发明名称 |
PHOTORESIST FILM |
摘要 |
PURPOSE: To form a photoresist layer excellent in dispersion stability without causing defective dispersion of a phosphor and to improve the adhesion of the phosphor by incorporating a specified silane compd. and the phosphor into a photosensitive resin compsn. and laminating the resultant compsn. on a base film. CONSTITUTION: A phosphor and at least one kind of silane compd. selected from among epoxysilane, aminosilane and chloropropylsilane are incorporated into a photosensitive resin compsn. and the resultant compsn. is laminated on a base film to obtain the objective photoresist film. The phosphor is not especially limited but a phosphor obtd. by activating a matrix such as oxyhalide of a rare earth element with an activator is preferably used. Epoxysilane such as γ-glycidoxy-propyltrimethoxysilane or γ-glycidoxypropyltriethoxysilane is especially preferably used as the silane compd. Two or more kinds of such silane compds. may be used in combination. |
申请公布号 |
JPH0895250(A) |
申请公布日期 |
1996.04.12 |
申请号 |
JP19940252946 |
申请日期 |
1994.09.20 |
申请人 |
NIPPON SYNTHETIC CHEM IND CO LTD:THE;MITSUBISHI ELECTRIC CORP |
发明人 |
IZUMI TSUKASA;SUGITA HIROSUKE;ARIMOTO HIRONOBU |
分类号 |
G03F7/004;C09K11/00;G03F7/027;G03F7/028;G03F7/032;G03F7/038;G03F7/075;H01J9/227;H01J11/42;H01J17/04 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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