Surface-type acceleration sensor for motor vehicle system

摘要

The sensor (1) includes a single crystalline base-plate (2) made of P-type silicon in the front surface of which a recess (3) is formed. Also provided is a lever structural region (5), and a strain gauge (7). The lever region has an epitaxially propagated layer (6) of single crystal N-type silicon. The lever structural region is positioned in the recess so that it can move. The strain gauge, or a thin film extension meter of chromium or of polycrystalline silicon, is applied at a top surface of the lever structural region. The diffused strain gauge is made of P-type silicon. The strain gauge is applied on the top surface of the lever beam which also supports a mass region. The crystal plane index of the base-plate is made of single crystal silicon of the type 110 and the longitudinal direction of the strain gauge is approximately parallel to the direction 111.