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发明名称
Ionenstrahl-Stellungssensor
摘要
申请公布号
DE3855060(D1)
申请公布日期
1996.04.11
申请号
DE19883855060
申请日期
1988.09.15
申请人
VARIAN ASSOCIATES, INC., PALO ALTO, CALIF., US
发明人
SZAJNOWSKI, WIESLAW JERZY, GUILDFORD SURREY, GU1 2AX, GB
分类号
H01J37/04;G06F17/10;H01J37/317;(IPC1-7):G01T1/29
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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