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经营范围
发明名称
Hochauflösendes lithographisches Verfahren
摘要
申请公布号
DE69208769(D1)
申请公布日期
1996.04.11
申请号
DE19926008769
申请日期
1992.07.28
申请人
TEXAS INSTRUMENTS INC., DALLAS, TEX., US
发明人
DOUGLAS, MONTE A., COPPELL, TEXAS 75019, US
分类号
G03F7/26;G03F7/36;G03F7/38;H01L21/027;H01L21/30;(IPC1-7):G03F7/36
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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