HEATING PLATE FOR HEATING AN OBJECT ON ITS SURFACE AND CHEMICAL TREATMENT REACTOR PROVIDED WITH SAID PLATE

摘要

Heating plate for heating an object such as a substrate placed on its surface. The aim of the invention is to provide a plate havig a precisely adjustable surface temperature and wherein the quantities of heat supplied by two plate surface areas can be different even if said areas are small and adjacent. The aim is attained by a plate, characterized in that it comprises areas (10), in each of which is disposed an electrically conducting heating element (8), n+1 sensors (12) for measuring the plate's temperature, n denoting an integer greater than 1, means (14) for processing data supplied by the sensors (12), means (16) for comparing processed data with at least one reference value and means (20) for adjusting the intensity of current flowing in the elements (8), said means (20) being controlled by means (16). The invention is especially concerned with plates of chemical treatment reactors.