摘要 |
FIELD: measurement technology; measuring carbon monoxide content in exhaust gases of internal combustion engines, ethanol in ambient atmosphere, ammonia in industrial premises and other gases liberated during production processes. SUBSTANCE: gas concentration sensor has base, film heaters, dielectric layer, gas-sensitive member and electrodes for connection to voltage source. Design peculiarity of sensor is that heater and gas-sensitive member are made of one and the same metal oxide, preferably, SnO, with alloying additions. All surface of gas-sensitive member is layer of alternating microirregularities of, for instance, saw-like form. Thickness of this layer is commensurable with size of grain of used metal oxide; no precious metals are used in sensor. EFFECT: enhanced manufacturability of sensor, relatively low cost, improved response to gases to be detected. |