| 摘要 |
FIELD: application of coatings. SUBSTANCE: elongated anode design is offered which has many points to which electrons flow. Anode may be made of many wire brushes attached to metal rod. Use of anode in magnetron systems considerably reduces growing of dielectric material and improves uniformity of films, both, in chemically active (reactive) D.C.. spraying and also in nonreactive spraying. Besides, anode reduces overheating and increases service life of magnetron system subjected to reactive spraying of dielectric materials. One version of embodiment has magnetron system with cylindrical cathode and a pair of elongated anodes located parallel and at the same distance from cathode. EFFECT: applicable in deposition by spraying of uniform films of dielectric materials, including, silicon dioxide and silicon nitride. |
