发明名称 |
Sensor using tunnel current |
摘要 |
The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current. |
申请公布号 |
EP0706052(A2) |
申请公布日期 |
1996.04.10 |
申请号 |
EP19950115630 |
申请日期 |
1995.10.04 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TOHDA, TAKAO;MANABE, YOSHIO;KADO, HIROYUKI;YOSHIDA, MASARU;TANAHASHI, ICHIRO |
分类号 |
G01B7/16;G01C19/56;G01D5/18;G01K7/22;G01L1/20;G01P15/00;G01P15/08;G01P15/12;G01Q10/00;G01Q20/04;G01Q60/24;G01Q60/38;G01Q70/16 |
主分类号 |
G01B7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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