CHARGED BEAM LITHOGRAPHY SYSTEM,申请号JP19940258800-传众专利搜索

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发明名称	CHARGED BEAM LITHOGRAPHY SYSTEM
摘要
申请公布号	JPH0897132(A)	申请公布日期	1996.04.12
申请号	JP19940258800	申请日期	1994.09.28
申请人	TOSHIBA MACH CO LTD	发明人	NUMAGA TAKUOKI
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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