| 摘要 |
PURPOSE: To produce a high molecular metallic polymer low in residual org. matter and uniform in stoichiometric ratio by forming an amorphous inorg. polymer thin film consisting of a specified metal oxide on a substrate. CONSTITUTION: A light generated from a light irradiation device 2 such as UV ray lamp is reflected with a mirror 8 and applied on a container 6 provided on a stirrer 5 and housing a soln. containing metal alkoxide and stirred with a stirrer. After sufficiently propagating sol.gel reaction by light-irradiating for a fixed time, the mirror 8 is took up on a monochromator. Then, after forming a film by immersing the substrate 9 having <=300 deg.C decomposition temp. in a reaction soln. through a immersing device 4, the substrate 9 is took up, and the amorphous inorg. polymer thin film consisting of the metal oxide containing an oxygen more than 86 atom % by stoichiometric composition, and C-H bond having 0.01-4 atom % carbon is formed on the substrate 9 by light-irradiating for a fixed time. |
