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发明名称
Magnetron-Zerstäubungsvorrichtung
摘要
申请公布号
DE69117473(D1)
申请公布日期
1996.04.04
申请号
DE19916017473
申请日期
1991.12.19
申请人
NOVELLUS SYSTEMS, INC., SAN JOSE, CALIF., US
发明人
MILLER, KENNETH C., MOUNTAIN VIEW, CALIFORNIA 94043, US;BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US
分类号
C23C14/35;H01J37/34;H01L21/203;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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