发明名称 FIXED VALUE STORAGE CELL ARRANGEMENT AND METHOD OF PRODUCING THE SAME
摘要 The invention concerns a fixed value storage cell arrangement comprising, in a substrate (21) of semiconductor material, storage cells each having a vertical MOS transistor. The various logical values (zero, one) are brought about by gate dielectrics (27, 28) of different thicknesses. The storage cell arrangement can be produced in particular in a silicon substrate using few process steps and a high packing density. The storage cell arrangement and a readout control circuit can thus be produced integrally.
申请公布号 WO9610266(A1) 申请公布日期 1996.04.04
申请号 WO1995DE01262 申请日期 1995.09.14
申请人 SIEMENS AKTIENGESELLSCHAFT;KRAUTSCHNEIDER, WOLFGANG;RISCH, LOTHAR;HOFMANN, FRANZ;ROESNER, WOLFGANG 发明人 KRAUTSCHNEIDER, WOLFGANG;RISCH, LOTHAR;HOFMANN, FRANZ;ROESNER, WOLFGANG
分类号 H01L21/8247;H01L21/8246;H01L27/112;H01L29/788;H01L29/792 主分类号 H01L21/8247
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