Herstellungsverfahren von mehrlagigen keramischen Substraten.

摘要

A method for fabricating a ceramic multi-layer substrate by a greensheet process includes a step of bonding an organic resin film (3) on a ceramic greensheet (1) cast on a carrier film (2); a step of forming a through-hole (5) on said ceramic greensheet in a state in which this ceramic greensheet retains one or both of said films and filling conductive paste (7) in said through-hole by using one of said films as a mask; a step of removing one of said films, placing said ceramic greensheet on a stack of ceramic greensheets forming a base (9), forming a laminate assembly (14) by applying pressure thereto, and removing the other of said films remaining in said assembly. It is possible to suppress the occurrence of deformation in dimensions of greensheets when they are processed and of displacement or misalignment when they are laminated.