| 发明名称 |
METHOD OF MANUFACTURING A DEVICE, BY IRRADIATING SOME PARTS OF THE SURFACE OF THE DEVICE DIRECTLY THROUGH A MASK, AND OTHER PARTS INDIRECTLY THROUGH THE MASK AND VIA A REFLECTING SURFACE, THEREBY PRODUCING A PATTERN |
| 摘要 |
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| 申请公布号 |
EP0704145(A1) |
申请公布日期 |
1996.04.03 |
| 申请号 |
EP19950913301 |
申请日期 |
1995.04.07 |
| 申请人 |
PHILIPS ELECTRONICS N.V. |
发明人 |
NELLISSEN, ANTONIUS, JOHANNES, MARIA |
| 分类号 |
H05K3/06;G03F7/20;G03F7/24;H01L21/60;H05K1/00;H05K3/00;H05K3/02;H05K3/40;(IPC1-7):H05K3/02 |
主分类号 |
H05K3/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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