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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0888255(A)
申请公布日期
1996.04.02
申请号
JP19940225225
申请日期
1994.09.20
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
SHIMIZU YOSHIAKI
分类号
G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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