FORMATION OF PHOSPHORUS-CONTAINING TITANIUM OXIDE FILM, PRODUCTION OF SOLAR CELL AND DEVICE THEREFOR

摘要

PURPOSE: To easily produce a solar cell capable of giving a high short-circuit current through a small number of processes and to form a phosphorus-contg. titanium oxide film fit for the solar cell. CONSTITUTION: The front surface 1a of a p-type silicon crystal substrate 1 is made rugged 22a, 22b and heated to a prescribed temp., titanium and phosphorus compds. are fed to the front surface 1a in a gaseous state and the objecting phosphorus-contg. titanium oxide film 2 is formed by bringing the compds. into a reaction. The substrate 1 is then heat-treated at a prescribed temp. By this heat treatment, phosphorus is diffused from the film 2, p-n junction is formed and an antireflection film made of the film 2 is formed. A rear electrode 4 is formed on the rear 1b of the substrate 1 and electrode 6 each having a light receiving face are formed on the front surface 1a.