| 摘要 |
<p>PURPOSE: To obtain a thin-film capacitor whose impedance is reduced by using a board made of a high-melting-point metal, which is used as a decoupling capacitor, which restrains a change in the characteristic of an electronic component requiring a high-speed property and which increases the reliability of the electronic component. CONSTITUTION: A thin-film capacitor is constituted in such a way that it contains a first electrode 17 which is composed of a metal board 12 composed of Mo and of an oxidation-preventive film 16 composed of Pt and a second electrode 18 which is composed of Cr electrodes 14 and a Cu electrode 15 which are arranged and installed so as to face the first electrode 17 and that an STO film which is composed of a dielectric 13 is interposed between the electrodes.</p> |
