发明名称 |
Instrument for the measurement of electrical characteristics during manufacturing processes |
摘要 |
A measurement technique and instrument using rectangular pulse trains of differing repetition rates and synchronously operated lock-in amplifiers to reject electrical noise and capture changes in resistance and capacitance of an electrical element even during a short electrical pulse applied thereto or in the presence of high levels of electrical noise. Particular applications are for electrical programming of fuses and repair of conductors by material deposition.
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申请公布号 |
US5504434(A) |
申请公布日期 |
1996.04.02 |
申请号 |
US19950453590 |
申请日期 |
1995.05.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SCHEPIS, DOMINIC J.;SESHAN, KRISHNA |
分类号 |
H01L21/48;H01L21/66;(IPC1-7):H01L21/66;G01R31/26 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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