发明名称 Instrument for the measurement of electrical characteristics during manufacturing processes
摘要 A measurement technique and instrument using rectangular pulse trains of differing repetition rates and synchronously operated lock-in amplifiers to reject electrical noise and capture changes in resistance and capacitance of an electrical element even during a short electrical pulse applied thereto or in the presence of high levels of electrical noise. Particular applications are for electrical programming of fuses and repair of conductors by material deposition.
申请公布号 US5504434(A) 申请公布日期 1996.04.02
申请号 US19950453590 申请日期 1995.05.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SCHEPIS, DOMINIC J.;SESHAN, KRISHNA
分类号 H01L21/48;H01L21/66;(IPC1-7):H01L21/66;G01R31/26 主分类号 H01L21/48
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