SPIN DRIER FOR LARGE-SIZED SUBSTRATE AND METHOD FOR DRYING LARGE-SIZED SUBSTRATE

摘要

PURPOSE: To make drying efficiency higher than when a large-sized substrate is rotated independently and to suppress the generation of staining and unequal drying by disposing a disk of which the surface facing this large-sized substrate is planar to face the substrate on the large-sized substrate. CONSTITUTION: The large-sized substrate on a transporting conveyor 9 is transferred and placed on a turn table 10 by a carrying-in arm 13. A cover 29, then, descends to cover a drying chamber and an air cylinder 25 is actuated to lower the disk 21 of which the surface facing the substrate is planar and which is disposed to face the large-sized substrate down to the inter-surface distance to the large-sized substrate. Next, pure water is emitted in the form of a stream from a pure water nozzle at the center of the disk 12 to execute final rinsing prior to drying. After the rinsing is executed for the prescribed period of time, the pure water nozzle is changed over to a gas nozzle and nitrogen or dry air is blown under a pressure of 1 to 3kg/cm<2> , by which the large-sized substrate is dried while the substrate is kept rotated at 1000 to 2000rpm by taking the prevention of jumping out or failure of the large-sized substrate into consideration.