| 摘要 |
<p>PURPOSE: To reduce the positioning time of a movable body, and improve positioning precision, by installing a position/acceleration forming means which forms centroid position moving information and reaction force information of the movable body according to a velocity command value, and outputs the information to an attitude control equipment of a surface plate mounting the movable body. CONSTITUTION: When a moving target position Ds1 is given to a stage positioning control equipment, a velocity command arithmetic part 1 obtains the position deviation between the target position Ds1 and the present position obtained by a position measuring apparatus 7, i.e., the driving amount of a stage 6. When the obtained driving amount is sufficiently large, a velocity command string Vs expressed by the form of time series is further formed, and sequentially outputted as velocity commands Ds2=Vs, at constant time intervals ofΔt. A possition/acceleration arithemetic part 10 forms position information P and acceleration information A from the velocity command string Vs, and transfers the information P and the information A to an attitude control equipment 28 of a surface plate.</p> |
