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发明名称
THIN FILM FORMING METHOD
摘要
申请公布号
JPH0888186(A)
申请公布日期
1996.04.02
申请号
JP19940223587
申请日期
1994.09.19
申请人
SANYO ELECTRIC CO LTD
发明人
HARADA YASUKI;TERADA NORIHIRO
分类号
C23C16/44;C23C16/455;C23C16/50;C23C16/505;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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