| 摘要 |
PURPOSE: To provide a method for forming the electrode of electronic part& stabilized in electrical characteristic and rich in reliability without lowering productivity and to provide a jig used therefor. CONSTITUTION: A first film forming pattern mask sheet 24 having film forming holes 48, 50 and 60 is arranged on the rear of a work 80 to be used as a substrate, and a second film forming pattern mask sheet 26 having a film forming hole 68 is arranged on the front of the work 80. A first auxiliary mask sheet 98 having holes corresponding to the film forming holes 48, 50 and 60 is arranged on the rear of the first film forming pattern mask sheet 26. A second auxiliary mask sheet 100 having holes corresponding to the film forming hole 68 is arranged on the front of the second film forming pattern mask sheet 26. Further, the work 80 is held between the first film forming pattern mask sheet 24 and the second film forming pattern mask sheet 26, and the work 80 is placed at a specified position. Subsequently, an electrode is selectively formed on the front and rear of the work 80 by sputtering. |
