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发明名称
FOCUSING METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM APPARATUS
摘要
申请公布号
JPH0887973(A)
申请公布日期
1996.04.02
申请号
JP19940222878
申请日期
1994.09.19
申请人
JEOL LTD
发明人
ASARI TOSHIHIRO
分类号
H01J37/141;H01J37/21;(IPC1-7):H01J37/21
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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