| 发明名称 |
Excimer lamp with high pressure fill |
| 摘要 |
An excimer lamp utilizing a high pressure fill. The fill includes a halogen at an operating pressure of greater than about 350 torr or the combination of a halogen and a rare gas at a total operating pressure of greater than about 2.5 atmospheres.
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| 申请公布号 |
US5504391(A) |
申请公布日期 |
1996.04.02 |
| 申请号 |
US19930008783 |
申请日期 |
1993.01.27 |
| 申请人 |
FUSION SYSTEMS CORPORATION |
发明人 |
TURNER, BRIAN;DOLAN, JAMES T. |
| 分类号 |
F21S2/00;G03F7/20;H01J61/12;H01J61/82;H01J65/04;H05B41/24;H05B41/28;(IPC1-7):H01J61/12;H01J61/20 |
主分类号 |
F21S2/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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