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发明名称
MANUFACTURE OF THIN FILM SEMICONDUCTOR PANEL
摘要
申请公布号
JPH0888370(A)
申请公布日期
1996.04.02
申请号
JP19940248730
申请日期
1994.09.16
申请人
CASIO COMPUT CO LTD
发明人
YAMAUCHI SHINGO
分类号
H01L21/20;H01L21/265;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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